| 000 | 00477nam a22001697a 4500 | ||
|---|---|---|---|
| 005 | 20170711111527.0 | ||
| 008 | 170711b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781781547007 | ||
| 041 | _aeng | ||
| 082 |
_a620.5 _bJIA |
||
| 100 |
_aJiang Guomin ; _917493 |
||
| 100 |
_aShen Kai ; _917494 |
||
| 245 | _aFundamentals Techniques in Microfabrication and Nanotechnology / | ||
| 260 |
_aUnited Kingdom ; _bAuris Reference : _c2015. |
||
| 300 | _a286 p, 24cm ; | ||
| 942 | _cBK | ||
| 999 |
_c33845 _d33845 |
||