| 000 | 00367cam a2200121ua 4500 | ||
|---|---|---|---|
| 008 | 140605n2012 ii |||gr||||Z||||||eng | ||
| 082 |
_a620.5 _bMAN |
||
| 100 |
_aMandou ,Mach J, _eAuthor ., |
||
| 245 |
_aFundamentals of microfabrication and nanotechnology : _bvol III / _cby Marc J Mandou . |
||
| 250 | _a1st ed . | ||
| 260 |
_aNew York _bCRC Press _c2012 |
||
| 942 | _cBK | ||
| 999 |
_c23199 _d23199 |
||