| 000 | 00813cam a2200217ua 4500 | ||
|---|---|---|---|
| 008 | 140507n ii |||gr||||Z||||||eng | ||
| 020 | _a9781437734836 | ||
| 020 | _a1437734839 | ||
| 082 |
_a _bWAS |
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| 245 |
_aHandbook of sputter deposition technology : _bfundamentals and applications for functional thin films, nanomaterials and MEMS / _cedited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera. |
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| 250 | _a2nd ed. | ||
| 260 |
_aWaltham, MA : _bWilliam Andrew, _c2012. |
||
| 300 |
_axii, 644 p. : _c24 cm.. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 |
_aCathode sputtering (Plating process) _vHandbooks, manuals, etc. |
||
| 650 |
_aThin films _vHandbooks, manuals, etc. |
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| 700 | _aWasa, Kiyotaka. | ||
| 700 | _aKanno, Isaku. | ||
| 700 | _aKotera, Hidetoshi. | ||
| 942 | _cBK | ||
| 999 |
_c23055 _d23055 |
||