| 000 | 00420cam a2200145ua 4500 | ||
|---|---|---|---|
| 008 | 140129n2005 ii |||gr||||Z||||||eng | ||
| 020 | _a9780849328381(hb) | ||
| 082 |
_a621 _bLYS |
||
| 100 |
_aLyshevski,. sergey Edward , _eAuthor ., |
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| 245 |
_anano and micro eletromechanical systems _cby sergey Edward Lyshevski |
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| 250 | _a1st ed . | ||
| 260 |
_aNew York _bCRC Press _c2005 |
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| 300 |
_a544p.: _c22cm. |
||
| 942 | _cBK | ||
| 999 |
_c21157 _d21157 |
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