| 000 | 00429cam a2200145ua 4500 | ||
|---|---|---|---|
| 008 | 140106n1993 ii |||gr||||Z||||||eng | ||
| 020 | _a0824787536(hbk) | ||
| 082 |
_a670.42 _bOHM |
||
| 100 |
_aOhmi, Tadahiro, _eAuthor. |
||
| 245 |
_aUltraclean technology handbook vol- 1 ultrapure water _cEdited by Tadahiro Ohmi |
||
| 250 | _a1st ed. | ||
| 260 |
_aNew York _bMarcel Dekker Inc _c1993 |
||
| 300 |
_aiii,928p.: _c26cm. |
||
| 942 | _cBK | ||
| 999 |
_c19827 _d19827 |
||