| 000 | 00489cam a2200145ua 4500 | ||
|---|---|---|---|
| 008 | 131202n2006 xxu |||gr||||Z||||||eng | ||
| 020 | _a0387245200(hbk) | ||
| 082 |
_a620.5 _bLEO |
||
| 100 |
_aLeondes, Cornelius T., _eEditor. |
||
| 245 |
_aMems / Nems handbook Techniques and Application vol- 2 : _bfabrication technology / _cEditor by Cornelius T. Leondes . |
||
| 250 | _a1st ed. | ||
| 260 |
_aNew York _bSpringer Science Business Media _c2006 |
||
| 300 |
_aix,332p.: _c24cm. |
||
| 942 | _cBK | ||
| 999 |
_c19334 _d19334 |
||