| 000 | 00476cam a2200145ua 4500 | ||
|---|---|---|---|
| 008 | 131202n2010 ii |||gr||||Z||||||eng | ||
| 020 | _a97814200551609hbk) | ||
| 082 |
_a621.381 _bMAD |
||
| 100 |
_aMadou, Marc J., _eAuthor ., |
||
| 245 |
_aFundamentals of microfabrication and nanotechnology : _bvol.III, from mems to bio-mems and bio-nems / _cby Marc J. Madou . |
||
| 250 | _a3rd ed . | ||
| 260 |
_aNew York _bCRC Press _c2010 |
||
| 300 |
_aix, 475p. : _c26cm. |
||
| 942 | _cBK | ||
| 999 |
_c19025 _d19025 |
||