| 000 | 00497cam a2200145ua 4500 | ||
|---|---|---|---|
| 008 | 131202n2010 ii |||gr||||Z||||||eng | ||
| 020 | _a9781420055191(hbk) | ||
| 082 |
_a621.381 _bMAD |
||
| 100 |
_aMadou, Marc J., _eAuthor ., |
||
| 245 |
_aFundamenats of microfabrication and nanotechnology : _bvol.2, manufacturing techniques for microfabrication and nanotechnology / _cby Marc J. Madou . |
||
| 250 | _a3rd ed. | ||
| 260 |
_aNew York _bCRC Press _c2010 |
||
| 300 |
_aix, 509: _c26cm. |
||
| 942 | _cBK | ||
| 999 |
_c19024 _d19024 |
||