000			00526cam a2200145ua 4500
008			131202n ii |||gr||||Z||||||eng
020			_a9781420055115(hbk)
082			_a621.381 _bMAD
100			_aMadou, Marc J., _eAuthor .,
245			_aFundamentals of microfabrication and nanotechnology : _bvol.I, solid state physics, fluidics,and analytical techniques in micro and nanotechnology / _cby Marc J. Madou .
250			_a3rd ed .
260			_aNew York: _bCRC Press, _c2012.
300			_aix, 631p. : _c28cm.
942			_cBK
999			_c19023 _d19023