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Fundamentals of microfabrication and nanotechnology : vol.I, solid state physics, fluidics,and analytical techniques in micro and nanotechnology / by Marc J. Madou . by
Edition: 3rd ed .
Material type: Text Text; Audience: General;
Publication details: New York: CRC Press, 2012
Availability: Items available for loan: Central Library (2)Call number: 621.381 MAD, ...

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2.
Fundamenats of microfabrication and nanotechnology : vol.2, manufacturing techniques for microfabrication and nanotechnology / by Marc J. Madou . by
Edition: 3rd ed.
Material type: Text Text; Audience: General;
Publication details: New York CRC Press 2010
Availability: No items available.

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Fundamentals of microfabrication and nanotechnology : vol.III, from mems to bio-mems and bio-nems / by Marc J. Madou . by
Edition: 3rd ed .
Material type: Text Text; Audience: General;
Publication details: New York CRC Press 2010
Availability: Items available for loan: Central Library (1)Call number: 621.381 MAD.

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