Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials and MEMS / edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera.

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Material type: Text

TextPublication details: Waltham, MA : William Andrew, 2012.Edition: 2nd edDescription: xii, 644 p. : 24 cmISBN:

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Item type	Current library	Call number	Status	Date due	Barcode
Books	Central Library General Section	WAS (Browse shelf(Opens below))	Available		026219

Includes bibliographical references and index.

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