TY  - BOOK
AU  - Jiang  Guomin ;
AU  - Shen Kai  ;
TI  - Fundamentals Techniques in Microfabrication and Nanotechnology
SN  - 9781781547007
U1  - 620.5 
PY  - 2015///
CY  - United Kingdom
PB  - Auris Reference
ER  -