TY  - BOOK
AU  - Leondes, Cornelius T.,
TI  - Mems / Nems handbook Techniques and Application vol- 2 : : fabrication technology / 
SN  - 0387245200(hbk)
U1  - 620.5 
PY  - 2006///
CY  - New York
PB  - Springer Science Business Media
ER  -