TY  - BOOK
AU  - Madou, Marc J.,
TI  - Fundamentals of microfabrication and nanotechnology  : : vol.III, from mems to bio-mems and bio-nems / 
SN  - 97814200551609hbk)
U1  - 621.381 
PY  - 2010///
CY  - New York
PB  - CRC Press
ER  -