TY  - BOOK
AU  - Madou, Marc J.,
TI  - Fundamenats of microfabrication and nanotechnology : : vol.2, manufacturing techniques for microfabrication and nanotechnology / 
SN  - 9781420055191(hbk)
U1  - 621.381 
PY  - 2010///
CY  - New York
PB  - CRC Press
ER  -