TY  - BOOK
AU  - Madou, Marc J.,
TI  - Fundamentals of microfabrication and nanotechnology : : vol.I, solid state physics, fluidics,and analytical techniques in micro and  nanotechnology  / 
SN  - 9781420055115(hbk)
U1  - 621.381 
PY  - 2012///
CY  - New York
PB  - CRC Press
ER  -