Fundamentals of microfabrication and nanotechnology : vol.III, from mems to bio-mems and bio-nems / by Marc J. Madou .

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Material type: Text

TextPublication details: New York CRC Press 2010Edition: 3rd edDescription: ix, 475p. : 26cmISBN:

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Item type	Current library	Call number	Status	Date due	Barcode
Books	Central Library General Section	621.381 MAD (Browse shelf(Opens below))	Available		023746-C

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