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Fundamenats of microfabrication and nanotechnology : vol.2, manufacturing techniques for microfabrication and nanotechnology / by Marc J. Madou .

By: Material type: TextTextPublication details: New York CRC Press 2010Edition: 3rd edDescription: ix, 509: 26cmISBN:
  • 9781420055191(hbk)
DDC classification:
  • 621.381 MAD
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