Handbook of sputter deposition technology : (Record no. 23055)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00813cam a2200217ua 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 140507n ii |||gr||||Z||||||eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9781437734836 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 1437734839 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | |
| Item number | WAS |
| 245 ## - TITLE STATEMENT | |
| Title | Handbook of sputter deposition technology : |
| Remainder of title | fundamentals and applications for functional thin films, nanomaterials and MEMS / |
| Statement of responsibility, etc | edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera. |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Waltham, MA : |
| Name of publisher, distributor, etc | William Andrew, |
| Date of publication, distribution, etc | 2012. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xii, 644 p. : |
| Dimensions | 24 cm.. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc | Includes bibliographical references and index. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Cathode sputtering (Plating process) |
| Form subdivision | Handbooks, manuals, etc. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Thin films |
| Form subdivision | Handbooks, manuals, etc. |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Wasa, Kiyotaka. |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kanno, Isaku. |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kotera, Hidetoshi. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dewey Decimal Classification | Central Library | Central Library | General Section | 29/08/2014 | WAS | 026219 | 29/08/2014 | 29/08/2014 | Books |
You are Visitor No