Fundamenats of microfabrication and nanotechnology : (Record no. 19024)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00497cam a2200145ua 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 131202n2010 ii |||gr||||Z||||||eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9781420055191(hbk) |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 |
| Item number | MAD |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Madou, Marc J., |
| Relator term | Author ., |
| 245 ## - TITLE STATEMENT | |
| Title | Fundamenats of microfabrication and nanotechnology : |
| Remainder of title | vol.2, manufacturing techniques for microfabrication and nanotechnology / |
| Statement of responsibility, etc | by Marc J. Madou . |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 3rd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | New York |
| Name of publisher, distributor, etc | CRC Press |
| Date of publication, distribution, etc | 2010 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | ix, 509: |
| Dimensions | 26cm. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
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