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Microfabrication and nanomanufacturing /

Microfabrication and nanomanufacturing / edited by Mark J. Jackson. - 1st ed - Boca Raton, FL : CRC/Taylor & Francis, 2006. - 401 p. : hbk.

ISBN: 0824724313 (Hardcover) 9780824724313

Subjects--Topical Terms:
Microelectronics.
Integrated circuits--Design and construction.
Nanomanufacturing.
Microelectromechanical systems--Design and construction.

Dewey Class. No.: 620.5 / JAC

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