Handbook of sputter deposition technology :
Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials and MEMS /
edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera.
- 2nd ed.
- Waltham, MA : William Andrew, 2012.
- xii, 644 p. : 24 cm..
Includes bibliographical references and index.
9781437734836 1437734839
Cathode sputtering (Plating process)--Handbooks, manuals, etc.
Thin films--Handbooks, manuals, etc.
/ WAS
Includes bibliographical references and index.
9781437734836 1437734839
Cathode sputtering (Plating process)--Handbooks, manuals, etc.
Thin films--Handbooks, manuals, etc.
/ WAS
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