Mems / Nems handbook Techniques and Application vol- 2 :

Leondes, Cornelius T.,

Mems / Nems handbook Techniques and Application vol- 2 : fabrication technology / Editor by Cornelius T. Leondes . - 1st ed. - New York Springer Science Business Media 2006 - ix,332p.: 24cm.

0387245200(hbk)

620.5 / LEO
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