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Fundamentals of microfabrication and nanotechnology :

Madou, Marc J.,

Fundamentals of microfabrication and nanotechnology : vol.III, from mems to bio-mems and bio-nems / by Marc J. Madou . - 3rd ed . - New York CRC Press 2010 - ix, 475p. : 26cm.

ISBN: 97814200551609hbk)

Dewey Class. No.: 621.381 / MAD

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