Fundamenats of microfabrication and nanotechnology :

Madou, Marc J.,

Fundamenats of microfabrication and nanotechnology : vol.2, manufacturing techniques for microfabrication and nanotechnology / by Marc J. Madou . - 3rd ed. - New York CRC Press 2010 - ix, 509: 26cm.

9781420055191(hbk)

621.381 / MAD
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