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Fundamentals of microfabrication and nanotechnology :

Madou, Marc J.,

Fundamentals of microfabrication and nanotechnology : vol.I, solid state physics, fluidics,and analytical techniques in micro and nanotechnology / by Marc J. Madou . - 3rd ed . - New York: CRC Press, 2012. - ix, 631p. : 28cm.

ISBN: 9781420055115(hbk)

Dewey Class. No.: 621.381 / MAD

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